Publication
研究業績
- 5.
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In situ Raman observation of structural transformation of diamond-like carbon films lubricated with MoDTC solution
Hikaru Okubo, Chiharu Tadokoro, Yuki Hirata, Shinya Sasaki
Proceedings of 6th European Conference on Tribology (2017)
- 4.
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Fundamental and tribological properties of thick CPB
Keisuke Sato, Hikaru Okubo, Yuki Hirata, Chiharu Tadokoro, Tomoya Fujimori, Ken Nakano, Yoshinobu Tsujii, Braham Prakash, Shinya Sasaki
Proceedings of 6th European Conference on Tribology (2017)
- 5.
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Deposition of a-C:H films on inner surface of high-aspect-ratio microchannel
Yuki Hirata, Junho Choi
Journal of Applied Physics 120 (2016) 065305 1-7
- 4.
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Deposition of a-C:H Films on a Nanotrench Pattern by Bipolar PBII&D
Yuki Hirata, Yuya Nakahara, Keisuke Nagato, Junho Choi
Journal of Physics D: Appl. Phys. 49 (2016) 245303 1-10
- 3.
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Structural and Mechanical Properties of Amorphous Carbon Films Deposited on the Micro-trench Patterns by Bipolar PBII and Plasma Analysis
Yuki Hirata, Junho Choi
Proceedings of International Tribology Conference, Tokyo 2015 (2015)
- 2.
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Amorphous Carbon Film as a Mold Release Layer for Nanoimprint Lithography
Yuki Hirata, Yuya Nakahara, Keisuke Nagato, Takahisa Kato, Junho Choi
Proceedings of International Tribology Conference, Tokyo 2015 (2015)
- 3.
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Microstructure of a-C:H film prepared on micro trench and analysis of ions and radicals behavior
Yuki Hirata, Junho Choi
Journal of Applied Physics 118 (2015) 08305 1-9
- 1.
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Analysis of microstructure and surface morphology of a-C:H films deposited on a trench target
Yuki Hirata, Takahisa Kato, Junho Choi
Proceedings of 10th International Conference on the Science of Hard Materials (2014)
- 2.
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DLC coating on a trench-shaped target by bipolar PBII
Yuki Hirata, Junho Choi, Takahisa Kato
International Journal of Refractory Metal and Hard Materials 49 (2014) 392-399
- 1.
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Study of DLC Coating to the Trench-Shaped Pattern by Bipolar PBII (バイポーラPBII法によるトレンチ形状物へのDLC成膜)
Yuki Hirata, Wonsoon Park, Junho Choi, Takahisa Kato
Journal of Japanese Society of Tribologists (in Japanese) 58 (2013) 841-847