Publication
研究業績
- 2.
-
DLC coating on a trench-shaped target by bipolar PBII
Yuki Hirata, Junho Choi, Takahisa Kato
International Journal of Refractory Metal and Hard Materials 49 (2014) 392-399
- 1.
-
Study of DLC Coating to the Trench-Shaped Pattern by Bipolar PBII (バイポーラPBII法によるトレンチ形状物へのDLC成膜)
Yuki Hirata, Wonsoon Park, Junho Choi, Takahisa Kato
Journal of Japanese Society of Tribologists (in Japanese) 58 (2013) 841-847