Publication
研究業績
33件中 31〜33件を表示
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Microstructure of a-C:H film prepared on micro trench and analysis of ions and radicals behavior
Yuki Hirata, Junho Choi
Journal of Applied Physics 118 (2015) 08305 1-9
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DLC coating on a trench-shaped target by bipolar PBII
Yuki Hirata, Junho Choi, Takahisa Kato
International Journal of Refractory Metal and Hard Materials 49 (2014) 392-399
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Study of DLC Coating to the Trench-Shaped Pattern by Bipolar PBII (バイポーラPBII法によるトレンチ形状物へのDLC成膜)
Yuki Hirata, Wonsoon Park, Junho Choi, Takahisa Kato
Journal of Japanese Society of Tribologists (in Japanese) 58 (2013) 841-847