Publication
研究業績
- 12.
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Effect of precursor gas on the structure and mechanical properties of hydrogenated amorphous carbon films deposited on a trench sidewall
Yuki Hirata, Kanju Kitamura, Takumi Ishikawa, Junho Choi
Journal of Applied Physics 625 (2019) 065306
- 11.
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Analysis of microstructure and surface morphology of a-C:H films deposited on a trench target
Yuki Hirata, Takumi Ishikawa, Junho Choi, Shinya Sasaki
Diamond & Related Materials 83 (2018) 1-7
- 10.
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Effect of Ar+ ion assist on the properties of a-C:H films deposited on a trench
Yuki Hirata, Koeki Onishi, Junho Choi
Thin Solid Films 631 (2017) 57-63
- 9.
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Structure and mechanical properties of a-C:H films deposited on a three-dimensional target: Comparative study on target scale and aspect ratio
Yuki Hirata, Junho Choi
Journal of Physics D: Appl. Phys. 50 (2017) 155204 1-9
- 8.
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In Situ Raman Observation of the Graphitization Process of taC under Boundary Lubrication in Poly-Alpha-Olefin with an Organic Friction Modifier
Hikaru Okubo, Chiharu Tadokoro, Yuki Hirata, Shinya Sasaki
Tribology Online 12 (2017) 229-237
- 7.
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Effects of Molecular Structure of Zinc Dialkyldithiophosphates on Tribological Properties of a a-C:H Film under Boundary Lubrication
Hikaru Okubo, Seiya Watanabe, Chiharu Tadokoro, Yuki Hirata, Shinya Sasaki
Tribology Online 12 (2017) 221-228
- 6.
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Effects of Si particles of Al-Si alloys on frictional properties of a-C:H films/Al-Si alloys tribopairs under lubrication with fully formulated oil
Hikaru Okubo, Yuki Noda, Chiharu Tadokoro, Yuki Hirata, Shinya Sasaki
Transactions of the JSME (in Japanese) 83 (2017) 1-12
- 5.
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Deposition of a-C:H films on inner surface of high-aspect-ratio microchannel
Yuki Hirata, Junho Choi
Journal of Applied Physics 120 (2016) 065305 1-7
- 4.
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Deposition of a-C:H Films on a Nanotrench Pattern by Bipolar PBII&D
Yuki Hirata, Yuya Nakahara, Keisuke Nagato, Junho Choi
Journal of Physics D: Appl. Phys. 49 (2016) 245303 1-10
- 3.
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Microstructure of a-C:H film prepared on micro trench and analysis of ions and radicals behavior
Yuki Hirata, Junho Choi
Journal of Applied Physics 118 (2015) 08305 1-9