Conference
学会発表
Years
- 6.
-
Deposition of a-C:H film on inner surface of High-Aspect-Ratio Microchannel
Yuki Hirata, Junho Choi
4th Nano Today Conference, Dubai, UAE, 2015. 12.
- 5.
-
Amorphous Carbon Film as a Mold Release Layer for Nanoimprint Lithography
Yuki Hirata, Yuya Nakahara, Keisuke Nagato, Takahisa Kato, Junho Choi
International Tribology Conference, Tokyo 2015, Tokyo, Japan, 2015. 9.
- 4.
-
Structual and Mechanical Properties of Amorphous Carbon Films Deposited on the Micro-trench Patterns by Bipolar PBII and Plasma Analysis
Yuki Hirata, Junho Choi
International Tribology Conference, Tokyo 2015, Tokyo, Japan, 2015. 9.
- 3.
-
The effects of negative bias voltage on the structural and mechanical properties of amorphous carbon film deposited on the micro-trench patterns
Yuki Hirata, Junho Choi
Materials Today Asia 2014, Kowloon, Hong Kong, 2014. 12.
- 2.
-
DLC coating on a trench-shaped target by bipolar PBII
Yuki Hirata, Takahisa Kato, Junho Choi
10th International Conference on the Science of Hard Materials, Cuncun, Mexico, 2014. 3.
- 1.
-
DLC coating on a micro-trench using bipolar PBII
Junho Choi, Hideyuki Tokioka, Wonsoon Park, Yuki Hirata, Takahisa Kato
Collaborative Conference on Materials Research 2013, Jeju, Korea, 2013. 6.